Back-End-of-Line Compatible Transistors for Monolithic 3-D Integration

Document Details

Document Type
Pub Defense Publication
Publication Date
Nov 01, 2019
Source ID
10.1109/mm.2019.2942978

Entities

People

  • Benjamin Grisafe
  • Huacheng Ye
  • Jeffrey D. Smith
  • Sourav Dutta
  • Srivatsa Srinivasa
  • Suman Datta

Organizations

  • Defense Advanced Research Projects Agency
  • Pennsylvania State University
  • Semiconductor Research Corporation
  • University of Notre Dame