Ultra-Low Power Gas Sensor Based on a 3D Array of Nanogaps

Document Details

Document Type
Pub Defense Publication
Publication Date
Dec 12, 2022
Source ID
10.1109/powermems56853.2022.10007608

Entities

People

  • Carlos H. Mastrangelo
  • Farhan Sadik Sium
  • Hanseup Kim
  • Ling Zang
  • Rana Dalapati
  • Seungbeom Noh
  • Shakir-ul Haque Khan

Organizations

  • Defense Advanced Research Projects Agency
  • University of Utah