Fabrication Process and Structural Characterization of Fused Silica-on-Silicon Toroidal Ring Gyroscope

Document Details

Document Type
Pub Defense Publication
Publication Date
Oct 31, 2021
Source ID
10.1109/sensors47087.2021.9639662

Entities

People

  • Andrei M. Shkel
  • Daryosh Vatanparvar
  • Doreen Hii

Organizations

  • Defense Advanced Research Projects Agency