Fabrication Process and Properties of Fully-Planarized Deep-Submicron Nb/Al– $\hbox{AlO}_{\rm x}\hbox{/Nb} $ Josephson Junctions for VLSI Circuits

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 01, 2015
Source ID
10.1109/tasc.2014.2374836

Entities

People

  • Leonard M. Johnson
  • Mark A. Gouker
  • Sergey K. Tolpygo
  • Terence J. Weir
  • Vladimir Bolkhovsky
  • William D Oliver

Organizations

  • Intelligence Advanced Research Projects Activity