A Substrate-Agnostic, Submicrometer PSAS-to-PSAS Self-Alignment Technology for Heterogeneous Integration
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Dec 01, 2021
- Source ID
- 10.1109/tcpmt.2021.3109913
Entities
People
- Joe L. Gonzalez
- Jonathan R. Brescia
- Muhannad S. Bakir
- Sreejith Kochupurackal Rajan
Organizations
- National Science Foundation
- United States Air Force