RF Waveguide Pattern Engineering to Mitigate Bonding Surface Nonuniformities in CMOS Compatible Fabrication Processes

Document Details

Document Type
Pub Defense Publication
Publication Date
Nov 01, 2022
Source ID
10.1109/tcpmt.2022.3217445

Entities

People

  • Andrew L. Starbuck
  • Andrew T. Pomerene
  • Anthony L. Lentine
  • Christina M. Dallo
  • Christopher T. Derose
  • Douglas C. Trotter
  • Forrest Valdez
  • Michael R. Gehl
  • Nicholas Boynton
  • Shawn C. Arterburn
  • Shayan Mookherjea
  • Thomas A. Friedmann

Organizations

  • Defense Advanced Research Projects Agency
  • Sandia National Laboratories
  • University of California, San Diego