Probing the Atomic-Scale Mechanisms of Time-Dependent Dielectric Breakdown in Si/SiO2 MOSFETs (June 2022)

Document Details

Document Type
Pub Defense Publication
Publication Date
Sep 01, 2022
Source ID
10.1109/tdmr.2022.3186232

Entities

People

  • Colin G. McKay
  • David Russell Hughart
  • Fedor V. Sharov
  • Gaddi S. Haase
  • Patrick M. Lenahan
  • Stephen J. Moxim

Organizations

  • Defense Threat Reduction Agency
  • Pennsylvania State University
  • Sandia National Laboratories