Highly Scalable NEMS Relays With Stress-Tuned Switching Voltage Using Piezoelectric Buckling Actuators

Document Details

Document Type
Pub Defense Publication
Publication Date
Oct 01, 2014
Source ID
10.1109/ted.2014.2331914

Entities

People

  • Gianluca Piazza
  • Usama Zaghloul

Organizations

  • Defense Advanced Research Projects Agency
  • National Science Foundation