Nano-CNC Machining of Sub-THz Vacuum Electron Devices

Document Details

Document Type
Pub Defense Publication
Publication Date
Oct 01, 2016
Source ID
10.1109/ted.2016.2594027

Entities

People

  • Branko K. Popovic
  • Claudio Paoloni
  • Diana Gamzina
  • Eunmi Choi
  • Logan G. Himes
  • Neville C. Luhmann
  • Robert Barchfeld
  • Yuan Zheng

Organizations

  • Defense Advanced Research Projects Agency
  • Engineering and Physical Sciences Research Council
  • National Science Foundation
  • Ulsan National Institute of Science and Technology
  • United States Department of Defense

Tags

Technology Areas

  • Microelectronics