RF Passive Components Based on Aluminum Nitride Cross-Sectional Lamé-Mode MEMS Resonators

Document Details

Document Type: Pub Defense Publication
Publication Date: Jan 01, 2017
Source ID: 10.1109/ted.2016.2621660

Entities

People

Cristian Cassella
Guofeng Chen
Gwendolyn Hummel
Matteo Rinaldi
Zhenyun Qian