Fin-Width Scaling of Highly Doped InGaAs Fins

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 01, 2019
Source ID
10.1109/ted.2019.2912618

Entities

People

  • Alon Vardi
  • Jesús A. del Alamo
  • Xin Zhao

Organizations

  • Defense Threat Reduction Agency
  • Korea Institute of Science and Technology
  • Lam Research
  • National Science Foundation