VO2 Phase-Transition-Based Vertical MEMS Microactuators

Document Details

Document Type
Pub Defense Publication
Publication Date
Oct 01, 2019
Source ID
10.1109/ted.2019.2937683

Entities

People

  • Chengzi Huang
  • Dana Weinstein
  • Shriram Ramanathan
  • Zhen Zhang

Organizations

  • Army Research Office