Large-Scale Fabrication of Submicrometer-Gate-Length MOSFETs With a Trilayer PtSe2 Channel Grown by Molecular Beam Epitaxy
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Mar 01, 2020
- Source ID
- 10.1109/ted.2020.2966434
Entities
People
- Alexander Göritz
- Asher Madjar
- James C. M. Hwang
- Kuanchen Xiong
- Lei Li
- Marco Lisker
- Maria Hilse
- Matthias Wietstruck
- Mehmet Kaynak
- Roman Engel-herbert
Organizations
- Air Force Office of Scientific Research
- National Science Foundation
- Office of Naval Research