Demonstration of CMOS-Compatible Multi-Level Graphene Interconnects With Metal Vias
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Apr 01, 2021
- Source ID
- 10.1109/ted.2021.3061637
Entities
People
- Chao-Hui Yeh
- Dujiao Zhang
- Junkai Jiang
- Kamyar Parto
- Kaustav Banerjee
- Kunjesh Agashiwala
Organizations
- Air Force Office of Scientific Research
- Army Research Office
- University of California