Analysis of Mo Sidewall Ohmic Contacts to InGaAs Fins

Document Details

Document Type: Pub Defense Publication
Publication Date: Oct 01, 2021
Source ID: 10.1109/ted.2021.3101993

Entities

People

Alon Vardi
Dongsung Choi
Jesús A. del Alamo

Organizations

Defense Threat Reduction Agency
Lam Research
Semiconductor Research Corporation