Defect Engineering at the Al2O3/(010)β-Ga2O3Interface via Surface Treatments and Forming Gas Post-Deposition Anneals

Document Details

Document Type
Pub Defense Publication
Publication Date
Oct 01, 2022
Source ID
10.1109/ted.2022.3200643

Entities

People

  • Ahmad E Islam
  • Andrew J. Green
  • Chenyu Zhang
  • Daniel M Dryden
  • David A. Muller
  • Jeremiah C. Williams
  • Kelson D. Chabak
  • Kevin Leedy
  • Kursti Delello
  • Kyle J. Liddy
  • Neil Moser
  • Rachel Kahler
  • Sabyasachi Ganguli
  • Stephen E. Tetlak

Organizations

  • Air Force Office of Scientific Research
  • Air Force Research Laboratory
  • Cornell University
  • KBR, Inc.