Influences of Orientation and Remote O2 Plasma Exposure on the Interface Properties of SiO2/β-Ga2O3 MOS Capacitors

Document Details

Document Type
Pub Defense Publication
Publication Date
Mar 01, 2023
Source ID
10.1109/ted.2023.3235322

Entities

People

  • Arkka Bhattacharyya
  • Michael A. Scarpulla
  • Muad Saleh
  • Rujun Sun
  • Sriram Krishnamoorthy

Organizations

  • Air Force Office of Scientific Research
  • University of Utah
  • Washington State University
  • Xidian University