Interfacial Layer Engineering in Sub-5-nm HZO: Enabling Low-Temperature Process, Low-Voltage Operation, and High Robustness

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 01, 2023
Source ID
10.1109/ted.2023.3270397

Entities

People

  • Eunseon Yu
  • Kaushik Roy
  • Mengwei Si
  • Peide Ye
  • Xiao Lyu

Organizations

  • Air Force Office of Scientific Research
  • Intelligence Advanced Research Projects Activity
  • National Science Foundation
  • Purdue University
  • Semiconductor Research Corporation
  • Shanghai Jiao Tong University