Nanoscale Magnification and Shape Control System for Precision Overlay in Jet and Flash Imprint Lithography

Document Details

Document Type
Pub Defense Publication
Publication Date
Feb 01, 2015
Source ID
10.1109/tmech.2013.2297679

Entities

People

  • Anshuman Cherala
  • Babak Mokaberi
  • Byung Jin Choi
  • Dwayne Labrake
  • Kosta Selinidis
  • Mario J. Meissl
  • Niyaz N. Khusnatdinov
  • Philip Schumaker
  • S. V. Sreenivasan

Organizations

  • Defense Advanced Research Projects Agency
  • National Institute of Standards and Technology