RF Dielectric Loss Due to MOCVD Aluminum Nitride on High Resistivity Silicon

Document Details

Document Type
Pub Defense Publication
Publication Date
May 01, 2017
Source ID
10.1109/tmtt.2017.2656865

Entities

People

  • Derek W. Johnson
  • Edwin L. Piner
  • Feyza Berber
  • Gregory H Huff
  • H. Rusty Harris
  • Kyle M. Sundqvist

Organizations

  • Office of Naval Research