10–60-GHz Electromechanical Resonators Using Thin-Film Lithium Niobate

Document Details

Document Type
Pub Defense Publication
Publication Date
Dec 01, 2020
Source ID
10.1109/tmtt.2020.3027694

Entities

People

  • Liuqing Gao
  • Ruochen Lu
  • Songbin Gong
  • Yansong Yang

Tags

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene
  • Microelectronics - Microelectromechanical Systems