Fabrication of Germanium Tin Microstructures Through Inductively Coupled Plasma Dry Etching

Document Details

Document Type
Pub Defense Publication
Publication Date
Jan 01, 2021
Source ID
10.1109/tnano.2021.3115509

Entities

People

  • Guangyang Lin
  • Haochen Zhao
  • J. Kolodzey
  • Jie Zhang
  • Peng Cui
  • Ryan Hickey
  • Tao Wang
  • Yuping Zeng

Organizations

  • Air Force Office of Scientific Research