Effects of Ion-Induced Displacement Damage on GaN/AlN MEMS Resonators

Document Details

Document Type
Pub Defense Publication
Publication Date
Mar 01, 2022
Source ID
10.1109/tns.2022.3143550

Entities

People

  • Bruce Alphenaar
  • J. L. Davidson
  • Jaesung Lee
  • Ji-Tzuoh Lin
  • Michael L. Alles
  • Philip X-L Feng
  • Robert A. Reed
  • Ronald D. Schrimpf
  • Wen Sui
  • Xu-Qian Zheng

Organizations

  • Defense Threat Reduction Agency
  • University of Florida
  • University of Louisville
  • Vanderbilt University