Particle-in-Cell Simulations With Fluid Metastable Atoms in Capacitive Argon Discharges: Electron Elastic Scattering and Plasma Density Profile Transition
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Sep 01, 2022
- Source ID
- 10.1109/tps.2022.3174401
Entities
People
- De‐Qi Wen
- Emi Kawamura
- Janez Krek
- John Verboncoeur
- Jon Tomas Gudmundsson
- Michael A. Lieberman
Organizations
- Air Force Office of Scientific Research
- Michigan State University
- National Science Foundation
- Science Institute
- University of California, Berkeley