Particle-in-Cell Simulations With Fluid Metastable Atoms in Capacitive Argon Discharges: Electron Elastic Scattering and Plasma Density Profile Transition

Document Details

Document Type
Pub Defense Publication
Publication Date
Sep 01, 2022
Source ID
10.1109/tps.2022.3174401

Entities

People

  • De‐Qi Wen
  • Emi Kawamura
  • Janez Krek
  • John Verboncoeur
  • Jon Tomas Gudmundsson
  • Michael A. Lieberman

Organizations

  • Air Force Office of Scientific Research
  • Michigan State University
  • National Science Foundation
  • Science Institute
  • University of California, Berkeley

Tags

Technology Areas

  • Microelectronics