AlScN Programmable Ferroelectric Micromachined Ultrasonic Transducer (FMUT)

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 20, 2021
Source ID
10.1109/transducers50396.2021.9495581

Entities

People

  • Bernard Herrera
  • Gabriel Giribaldi
  • Luca Colombo
  • Matteo Rinaldi
  • Michele Pirro

Organizations

  • Defense Advanced Research Projects Agency