In-Plane Bulk Acoustic Resonators Using 50nm-Thick Nano-Laminated Ferroelectric Hf0.5Zr0.5O2

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 20, 2021
Source ID
10.1109/transducers50396.2021.9495745

Entities

People

  • Faysal Hakim
  • Roozbeh Tabrizian
  • Troy Tharpe

Organizations

  • Defense Advanced Research Projects Agency