Epitaxial Lift-Off and Transfer of III-N Materials and Devices from SiC Substrates

Document Details

Document Type
Pub Defense Publication
Publication Date
Nov 01, 2016
Source ID
10.1109/tsm.2016.2599839

Entities

People

  • Brian P. Downey
  • D. Scott Katzer
  • David F. Storm
  • David J. Meyer
  • Matthew T. Hardy
  • Neeraj Nepal
  • Travis J. Anderson
  • Virginia D. Wheeler

Organizations

  • Defense Advanced Research Projects Agency
  • Office of Naval Research