Epitaxial ScAlN Etch-Stop Layers Grown by Molecular Beam Epitaxy for Selective Etching of AlN and GaN

Document Details

Document Type
Pub Defense Publication
Publication Date
Nov 01, 2017
Source ID
10.1109/tsm.2017.2749201

Entities

People

  • Brian P. Downey
  • D. Scott Katzer
  • David F. Storm
  • David J. Meyer
  • Matt Hardy
  • Neeraj Nepal

Organizations

  • Office of Naval Research