A Si-Compatible Fabrication Process for Scaled Self-Aligned InGaAs FinFETs

Document Details

Document Type
Pub Defense Publication
Publication Date
Nov 01, 2017
Source ID
10.1109/tsm.2017.2753141

Entities

People

  • A. Fernando-saavedra
  • A. Vardi
  • Jesús A. del Alamo
  • Jian Lin
  • Weiqin Lu
  • Xingchen Zhao

Organizations

  • Defense Threat Reduction Agency
  • Korea Institute of Science and Technology