Reduced Contact Resistance in GaN Using Selective Area Si Ion Implantation
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Nov 01, 2019
- Source ID
- 10.1109/tsm.2019.2932272
Entities
People
- Alan G Jacobs
- Andrew D. Koehler
- Boris N Feigelson
- Francis J. Kub
- Geoffrey M. Foster
- James C. Gallagher
- Jennifer K Hite
- Karl D. Hobart
- Michael A. Mastro
- Travis J. Anderson
Organizations
- Office of Naval Research