Direct-Write Laser Grayscale Lithography for Multilayer Lead Zirconate Titanate Thin Films
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- May 01, 2018
- Source ID
- 10.1109/tuffc.2018.2814349
Entities
People
- Daniel M. Potrepka
- Delaney M. Jordan
- Gabriel L. Smith
- Robert R. Benoit
- Ronald G. Polcawich
- Sarah S. Bedair
Organizations
- United States Army Research Laboratory