A ±0.3 ppm Oven-Controlled MEMS Oscillator Using Structural Resistance-Based Temperature Sensing

Document Details

Document Type: Pub Defense Publication
Publication Date: Aug 01, 2018
Source ID: 10.1109/tuffc.2018.2843781

Entities

People

Chang-Shun Liu
Farrokh Ayazi
Roozbeh Tabrizian

Organizations

Defense Advanced Research Projects Agency