Thin Film PZT-Based PMUT Arrays for Deterministic Particle Manipulation

Document Details

Document Type
Pub Defense Publication
Publication Date
Oct 01, 2019
Source ID
10.1109/tuffc.2019.2926211

Entities

People

  • Ajay Dangi
  • Christopher Cheng
  • Holly Lay
  • Liqiang Ren
  • Robert R. Benoit
  • Rudra Pratap
  • Sandy Cochran
  • Sri-Rajasekhar Kothapalli
  • Sudhanshu Tiwari
  • Sumit Agrawal
  • Susan Trolier-McKinstry
  • Thomas E. Mallouk
  • Yongqiang Qiu

Organizations

  • National Institute of Biomedical Imaging and Bioengineering
  • National Science Foundation