Growth of C-Axis Textured AlN Films on Vertical Sidewalls of Silicon Microfins

Document Details

Document Type
Pub Defense Publication
Publication Date
Mar 01, 2021
Source ID
10.1109/tuffc.2020.3013111

Entities

People

  • Mehrdad Ramezani
  • Nicholas G. Rudawski
  • Roozbeh Tabrizian
  • Valeriy Felmetsger