Application and Product-Volume-Specific Customization of BEOL Metal Pitch

Document Details

Document Type
Pub Defense Publication
Publication Date
Sep 01, 2018
Source ID
10.1109/tvlsi.2018.2828387

Entities

People

  • Lawrence Pileggi
  • Mayler G. A. Martins
  • Mehmet Meric Isgenc
  • Samuel N Pagliarini

Organizations

  • Defense Advanced Research Projects Agency
  • Intelligence Advanced Research Projects Activity