Hot Electrons as the Dominant Source of Degradation for Sub-5nm HZO FeFETs

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 01, 2020
Source ID
10.1109/vlsitechnology18217.2020.9265067

Entities

People

  • Ava J. Tan
  • Chenming Hu
  • Jong-Ho Bae
  • Li-Chen Wang
  • Luca Larcher
  • Milan Pešić
  • Sayeef Salahuddin
  • Yu-Hung Liao

Tags

Technology Areas

  • Microelectronics