Novel SU-8 optical waveguide microgripper for simultaneous micromanipulation and optical detection
Abstract
A novel microgripper device structure with optical waveguides as arms is presented. The devices shown here have waveguide dimensions of 50×30μm2. The device fabrication, using SU-8 polymer, is described. Its capability to perform micromanipulation while simultaneously carrying out optical detection is demonstrated.
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Nov 01, 2008
- Source ID
- 10.1116/1.2993171
Entities
People
- Jose A. Martinez
- Roberto R. Panepucci
Organizations
- Air Force Office of Scientific Research
- Florida International University