1.5 MeV electron irradiation damage in β-Ga2O3 vertical rectifiers

Abstract

Vertical rectifiers fabricated on epi Ga2O3 on bulk β-Ga2O3 were subject to 1.5 MeV electron irradiation at fluences from 1.79 × 1015 to 1.43 × 1016 cm−2 at a fixed beam current of 10−3 A. The electron irradiation caused a reduction in carrier concentration in the epi Ga2O3, with a carrier removal rate of 4.9 cm−1. The 2 kT region of the forward current–voltage characteristics increased due to electron-induced damage, with an increase in diode ideality factor of ∼8% at the highest fluence and a more than 2 order of magnitude increase in on-state resistance. There was a significant reduction in reverse bias current, which scaled with electron fluence. The on/off ratio at −10 V reverse bias voltage was severely degraded by electron irradiation, decreasing from ∼107 in the reference diodes to ∼2 × 104 for the 1.43 × 1016 cm−2 fluence. The reverse recovery characteristics showed little change even at the highest fluence, with values in the range of 21–25 ns for all rectifiers.

Document Details

Document Type
Pub Defense Publication
Publication Date
May 01, 2017
Source ID
10.1116/1.4983377

Entities

People

  • Akito Kuramata
  • Fan Ren
  • Gwangseok Yang
  • Jiancheng Yang
  • Jihyun Kim
  • Stephen Pearton

Organizations

  • Defense Threat Reduction Agency
  • Korea Institute of Energy Technology Evaluation and Planning
  • Korea University
  • Tamura Corporation
  • University of Florida

Tags

Readers

  • Nuclear and Radiation Engineering.
  • Pulsed Power and Plasma Physics.
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics