Detection of ammonia at low concentrations (0.1–2 ppm) with ZnO nanorod-functionalized AlGaN/GaN high electron mobility transistors

Abstract

AlGaN/GaN high electron mobility transistors with ZnO nanorod functionalized gates were used for detecting NH3 in the concentration range of 0.1–2 ppm balanced with air at ambient temperatures from 25 to 300 °C. A decrease in the high electron mobility transistor drain current was observed for exposure to the NH3-containing ambients, indicating an increase in negative charge at the heterointerface. The detection sensitivity increased monotonically with ammonia concentration at all temperatures, from 0.28% (25 °C) and 3.17% (300 °C) for 0.1 ppm to 1.32% (25 °C) and 13.73% (300 °C) for 2 ppm for a drain–source voltage of 1 V. The latter condition is attractive for low power consumption. The sensitivity was also a function of applied voltage and was generally higher in the linear region of the current–voltage characteristic of the transistor. The activation energy of the sensitivity was 0.09 eV, and the sensors showed no response to O2 (100%), CO2 (10%), CO (0.1%), CH4 (4%), and NO2 (0.05%) under the same detection conditions as used for the NH3. The response was less than 1 s, and recovery times were of order ∼53 s at 25 °C.

Document Details

Document Type
Pub Defense Publication
Publication Date
Jun 21, 2017
Source ID
10.1116/1.4989370

Entities

People

  • Fan Ren
  • Kwang Hyeon Baik
  • Soohwan Jang
  • Stephen Pearton
  • Sunwoo Jung

Organizations

  • Dankook University
  • Defense Threat Reduction Agency
  • Hongik University
  • National Research Foundation of Korea
  • University of Florida

Tags

Fields of Study

  • Materials science

Readers

  • Combustion science or combustion engineering.
  • Nanoscale Plasmonic Nanotechnology
  • Semiconductor Device Technology

Technology Areas

  • Microelectronics
  • Microelectronics - Microelectromechanical Systems