Atomic layer deposition of Al2O3 and TiO2 on MoS2 surfaces

Document Details

Document Type
Pub Defense Publication
Publication Date
Nov 01, 2018
Source ID
10.1116/1.5043621

Entities

People

  • Jaron A. Kropp
  • Theodosia Gougousi
  • Wenjuan Zhu
  • Yuhang Cai
  • Zihan Yao

Organizations

  • National Science Foundation
  • Office of Naval Research
  • University of Illinois Urbana–Champaign