High temperature operation to 500 °C of AlGaN graded polarization-doped field-effect transistors

Abstract

AlGaN polarization-doped field-effect transistors were characterized by DC and pulsed measurements from room temperature to 500 °C in ambient. DC current-voltage characteristics demonstrated only a 70% reduction in on-state current from 25 to 500 °C and full gate modulation, regardless of the operating temperature. Near ideal gate lag measurement was realized across the temperature range that is indicative of a high-quality substrate and sufficient surface passivation. The ability for operation at high temperature is enabled by the high Schottky barrier height from the Ni/Au gate contact, with values of 2.05 and 2.76 eV at 25 and 500 °C, respectively. The high barrier height due to the insulatorlike aluminum nitride layer leads to an ION/IOFF ratio of 1.5 × 109 and 6 × 103 at room temperature and 500 °C, respectively. Transmission electron microscopy was used to confirm the stability of the heterostructure even after an extended high-temperature operation with only minor interdiffusion of the Ni/Au Schottky contact. The use of refractory metals in all contacts will be key to ensure a stable extended high-temperature operation.

Document Details

Document Type
Pub Defense Publication
Publication Date
Apr 09, 2020
Source ID
10.1116/1.5135590

Entities

People

  • Albert G. Baca
  • Andrew A. Allerman
  • Andrew Armstrong
  • Brianna Klein
  • E Douglas
  • Fan Ren
  • Patrick H. Carey
  • Stephen Pearton

Organizations

  • Sandia National Laboratories
  • United States Department of Defense
  • United States Department of Energy
  • University of Florida

Tags

Fields of Study

  • Materials science

Readers

  • Semiconductor Device Technology

Technology Areas

  • Microelectronics