Depth-resolved cathodoluminescence and surface photovoltage spectroscopies of gallium vacancies in β-Ga2O3 with neutron irradiation and forming gas anneals

Abstract

The gallium vacancy is one of the dominant native point defects in β-Ga2O3, one that, together with its complexes, can have a major effect on free carrier densities and transport in this wide bandgap semiconductor. We used a combination of depth-resolved cathodoluminescence spectroscopy and surface photovoltage spectroscopy to identify the optical and energy-level properties of these defects as well as how their defect densities and spatial distributions vary with neutron irradiation and temperature-dependent-forming gas anneals. These studies reveal optical signatures that align closely with theoretical energy-level predictions. Likewise, our optical techniques reveal variations in these defect densities that are consistent with hydrogen passivation of gallium vacancies as a function of temperature and depth from the free Ga2O3 surface. These techniques can help guide the understanding and control of dominant native point defects in Ga2O3.

Document Details

Document Type
Pub Defense Publication
Publication Date
Aug 13, 2021
Source ID
10.1116/6.0001240

Entities

People

  • D. C. Look
  • Hantian Gao
  • Hongping Zhao
  • Kevin Leedy
  • Lei Cao
  • Leonard J Brillson
  • Md Rezaul Karim
  • Shreyas Muralidharan
  • Siddharth Rajan

Organizations

  • Air Force Office of Scientific Research
  • Air Force Research Laboratory
  • National Science Foundation
  • Ohio State University
  • United States Department of Energy
  • Wright State University

Tags

Fields of Study

  • Materials science
  • Physics

Readers

  • Quantum Dot Semiconductor Device Photonics and Graphene Optoelectronic Materials and THz Physics.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics