Investigation of a defect in the β-Ga2O3 substrate material from capacitance transients

Abstract

The defect ∼0.8 eV below the conduction band edge of β-Ga2O3 wide bandgap semiconductor is investigated using the matched Arrhenius-equation projection technique that offers substantial improvement over the conventional deep level transient spectroscopy technique. An experimental technique is developed to extract activation energy Ea and attempt-to-escape frequency ν0 of defects bypassing both the rate-window treatment and the Arrhenius plot. Only raw capacitance transients in the time domain are needed with this technique. The capacitance transients are projected between the temperature and time domains as well as to Ea and ν0 domains. Extraction of Ea and ν0 is accomplished by matching the projected and experimental capacitance transients to each other.

Document Details

Document Type
Pub Defense Publication
Publication Date
Oct 25, 2022
Source ID
10.1116/6.0002045

Entities

People

  • Adam T. Neal
  • Jian V. Li
  • Man Hoi Wong
  • Shin Mou

Organizations

  • Air Force Office of Scientific Research
  • Air Force Research Laboratory
  • Azimuth Corporation
  • University of Massachusetts Lowell

Tags

Fields of Study

  • Materials science

Readers

  • Computer Vision.
  • Thermal Physics or Thermal Science.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics