Variation in thermal stability of Ge1−xSnx films for infrared device applications

Abstract

We report on changes in Ge1−xSnx films (0.065 ≤ x ≤ 0.144) after short high-temperature anneals. Films were grown by molecular beam epitaxy on (001) Ge wafers, rapidly annealed, and characterized by x-ray diffraction, Raman spectroscopy, and optical microscopy. Sn segregated to the surface after a maximum temperature is inversely related to the Sn content. Lower content films showed little to no improvement in crystal quality below segregation temperatures, while higher content and partially relaxed films demonstrated improved uniformity for moderate annealing.

Document Details

Document Type
Pub Defense Publication
Publication Date
Jul 10, 2023
Source ID
10.1116/6.0002680

Entities

People

  • Amanda N. Lemire
  • Kevin Grossklaus
  • Thomas E. Vandervelde

Organizations

  • Air Force Office of Scientific Research
  • Office of Naval Research
  • Tufts University

Tags

Fields of Study

  • Materials science

Readers

  • Mathematics or Statistics
  • Semiconductor Device Technology