32 × 32 silicon photonic MEMS switch with gap-adjustable directional couplers fabricated in commercial CMOS foundry

Document Details

Document Type
Pub Defense Publication
Publication Date
Mar 24, 2021
Source ID
10.1117/1.jom.1.2.024003

Entities

People

  • Chang-kyu Kim
  • Jeremy Beguelin
  • John Jacobs
  • Kyoungsik Yu
  • Lane Ochikubo
  • Ming C. Wu
  • Niels Quack
  • Richard S. Muller
  • Sangyoon Han
  • Tae J. Seok

Organizations

  • Daegu Gyeongbuk Institute of Science and Technology
  • Defense Advanced Research Projects Agency
  • National Science Foundation
  • University of California, Berkeley