Precise pitch-scaling of carbon nanotube arrays within three-dimensional DNA nanotrenches

Abstract

Semiconducting carbon nanotubes (CNTs) are an attractive platform for field-effect transistors (FETs) because they potentially can outperform silicon as dimensions shrink. Challenges to achieving superior performance include creating highly aligned and dense arrays of nanotubes as well as removing coatings that increase contact resistance. Sun et al. aligned CNTs by wrapping them with single-stranded DNA handles and binding them into DNA origami bricks that formed an array of channels with precise intertube pitches as small as 10.4 nanometers. Zhao et al. then constructed single and multichannel FETs by attaching the arrays to a polymer-templated silicon wafer. After adding metal contacts across the CNTs to fix them to the substrate, they washed away all of the DNA and then deposited electrodes and gate dielectrics. The FETs showed high on-state performance and fast on-off switching.

Document Details

Document Type
Pub Defense Publication
Publication Date
May 22, 2020
Source ID
10.1126/science.aaz7440

Entities

People

  • Charles Rettner
  • Hareem T Maune
  • Jason K. Streit
  • Jeffrey Fagan
  • Jianshi Tang
  • Jie Shen
  • Ming Zheng
  • Noel Arellano
  • Peng Yin
  • Shu-jen Han
  • Thomas Schaus
  • Tianyang Cao
  • Toan Ta
  • Wei Sun
  • William M. Shih
  • Zhao Zhao
  • Zhiyu Zhou

Organizations

  • Air Force Office of Scientific Research
  • Harvard Medical School
  • Harvard University
  • International Business Machines Corporation (Armonk, NY)
  • National Institute of Standards and Technology
  • National Science Foundation
  • Office of Naval Research
  • Office of the Director

Tags

Readers

  • Electrical Engineering
  • Nanocomposite Materials Science
  • Semiconductor Device Technology