Emergent ferroelectricity in subnanometer binary oxide films on silicon

Abstract

The critical size limit of voltage-switchable electric dipoles has extensive implications for energy-efficient electronics, underlying the importance of ferroelectric order stabilized at reduced dimensionality. We report on the thickness-dependent antiferroelectric-to-ferroelectric phase transition in zirconium dioxide (ZrO 2 ) thin films on silicon. The emergent ferroelectricity and hysteretic polarization switching in ultrathin ZrO 2 , conventionally a paraelectric material, notably persists down to a film thickness of 5 angstroms, the fluorite-structure unit-cell size. This approach to exploit three-dimensional centrosymmetric materials deposited down to the two-dimensional thickness limit, particularly within this model fluorite-structure system that possesses unconventional ferroelectric size effects, offers substantial promise for electronics, demonstrated by proof-of-principle atomic-scale nonvolatile ferroelectric memory on silicon. Additionally, it is also indicative of hidden electronic phenomena that are achievable across a wide class of simple binary materials.

Document Details

Document Type
Pub Defense Publication
Publication Date
May 06, 2022
Source ID
10.1126/science.abm8642

Entities

People

  • Cheng-Hsiang Hsu
  • Costas P Grigoropoulos
  • Jim Ciston
  • John W Freeland
  • Nirmaan Shanker
  • Padraic Shafer
  • Sayeef Salahuddin
  • Shang-Lin Hsu
  • Suraj Cheema
  • Vladimir Stoica
  • Yoonsoo Rho
  • Zhan Zhang

Organizations

  • Advanced Light Source
  • Argonne National Laboratory
  • Lawrence Berkeley National Laboratory
  • Pennsylvania State University
  • University of California

Tags

Fields of Study

  • Physics

Readers

  • Materials Science and Engineering.
  • Quantum Dot Semiconductor Device Photonics and Graphene Optoelectronic Materials and THz Physics.
  • Thin Film Deposition Science.

Technology Areas

  • Microelectronics
  • Microelectronics - Graphene