Exfoliation of β-Ga2O3Along a Non-Cleavage Plane Using Helium Ion Implantation

Document Details

Document Type: Pub Defense Publication
Publication Date: Jan 01, 2019
Source ID: 10.1149/2.0051911jss

Entities

People

Mark S. Goorsky
Michael E Liao
Tingyu Bai
Yekan Wang

Organizations

Office of Naval Research