Band Alignments of Atomic Layer Deposited ZrO2and HfO2High-k Dielectrics with (-201) β-Ga2O3
Document Details
- Document Type
- Pub Defense Publication
- Publication Date
- Dec 06, 2016
- Source ID
- 10.1149/2.0131702jss
Entities
People
- Charles. R. Eddy Jr.
- David I. Shahin
- Marko J. Tadjer
- Virginia D. Wheeler
Organizations
- Office of Naval Research