Damage Recovery and Dopant Diffusion in Si and Sn Ion Implanted β-Ga2O3

Document Details

Document Type
Pub Defense Publication
Publication Date
Jan 01, 2019
Source ID
10.1149/2.0271907jss

Entities

People

  • A. Kuramata
  • Chaker Fares
  • David R. Smith
  • Fan Ren
  • Jaime A. Freitas Jr.
  • Mark E. Law
  • Marko J. Tadjer
  • Nadeemullah A. Mahadik
  • Ribhu Sharma
  • Stephen Pearton

Organizations

  • Defense Threat Reduction Agency
  • Office of Naval Research Global